Laser Induced Formation of Buried Void Layer in Silicon

Femtosecond laser-induced formation of spikes on silicon

Knudsen layer formation in laser induced thermal desorption.

Laser induced thermal desorption of Xe atoms into vacuum from a metal surface following the nano-second pulsed laser heating was investigated by the time-of-flight (TOF) measurement. The desorption flow was studied at a wide range of desorption flux by varying the initially prepared Xe coverage Θ (1 ML = 4.5 × 10(18) atoms/m(2)). At Θ = 0.3 ML, the TOF of Xe was well represented by a Maxwell-Bo...

Predictive Simulation of Void Formation during the Deposition of Silicon Nitride and Silicon Dioxide Films

The simulation of deposition processes enables to predict the shape of deposited films and voids for different trench shapes and process conditions. The position and shape of the voids determine the electrical characteristics of the final devices, e.g., memory cells. For these topography simulations a simulator was developed which uses an enhanced level set algorithm for describing the moving b...

‏‎suppression of coke formation in thermal cracking by coke inhibitors‎‏

‏‎the main purpose of this research was to:1.develop a coking model for thermal cracking of naphtha.2.study coke inhibition methods using different coke inhibitors.developing a coking model in naphtha cracking reactors requires a suitable model of the thermal cracking reactor based on a reliable kinetic model.to obtain reliable results all these models shall be solved simultaneously.for this pu...

Observation of Void Formation Induced by Electromigration in Metallic Films *’ **

für Naturforschung in cooperation with the Max Planck Society for the Advancement of Science under a Creative Commons Attribution 4.0 International License. Dieses Werk wurde im Jahr 2013 vom Verlag Zeitschrift für Naturforschung in Zusammenarbeit mit der Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. digitalisiert und unter folgender Lizenz veröffentlicht: Creative Commons Namen...